Semiconductor devices : modelling and technology
You have seen how, we have started with the first metal gate MOSFET technology and then, you have switched over to the polysilicon gate technology, because it gives a self-aligned technique. Particularly, as the device dimensions become smaller, the problem of the overhang capacitance or the overlap capacitance between the gate and the source and the drain becomes more and more severe and therefore, you would prefer to have a self-aligned technique, right and for that you have been using polysilicon gate MOSFET and then, we have also told you that you use a thick field oxide; the field oxide thickness must be large, so that the parasitic MOSFET has a very high threshold voltage, but at the same time if the field oxide thickness is very large it creates a problem of surface topography, right. That is the surface has a lot of ups and downs. So, in order to prevent it and have a planar surface, what do you use? That is you protect the active transistor region with a nitride oxide mask and then you have a local oxidation carried out in the rest of the region; you can either have this local oxide fully recessed or partially recessed. If it is fully recessed, then the final field oxide thickness will come only up to the surface.
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Save extra with 3 Offers. About The Book Semiconductor Devices Book Summary: Aimed primarily at the undergraduate students pursuing courses in semiconductor physics and semiconductor devices, this text emphasizes the physical understanding of the underlying principles of the subject. Since engineers use semiconductor devices as circuit elements, device models commonly used in the circuit simulators, e. SPICE, have been discussed in detail. With such in-depth coverage and a practical approach, practising engineers and PG students can also use this book as a ready reference.
Convert currency. Add to Basket. Condition: New. First edition. Aimed primarily at the undergraduate students pursuing courses in semiconductor physics and semiconductor devices, this text emphasizes the physical understanding of the underlying principles of the subject. Since engineers use semiconductor devices as circuit elements, device models commonly used in the circuit simulators, e.
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